Grip device for sheet-like objects
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United States of America Patent
Stats
-
Dec 29, 1987
Grant Date -
N/A
app pub date -
Apr 17, 1986
filing date -
Apr 17, 1985
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A gripping device for gripping an outer peripheral edge of an object to be grasped such as, for example, a semiconductor wafer, with the gripping device including a base, gripping members for gripping the object to be grasped, elastic members disposed between the base and the grip members so as to urge the respective grip members in an opening or closing direction. A driver for the grip members is provided, with the driver being fashioned as a linear or flat shape memory alloy member which is connected across the grip members.
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