Vacuum valve using improved diaphragm
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United States of America Patent
Stats
-
Jan 5, 1988
Grant Date -
N/A
app pub date -
Dec 8, 1986
filing date -
Dec 8, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A valve (10) comprising a plurality of passages (22,24), and an annular sealing area (30) in communication with one of the passages. The valve also includes a diaphragm (50), movably supported relative to the sealing area (30) in response to a force differential applied thereacross; including a thin, planar, flexible, non-metallic membrane (92) for sealably engaging against the sealing area.
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Cited Art Landscape
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