Temperature coefficient compensated pressure transducer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 23, 1988
Grant Date -
N/A
app pub date -
Jun 2, 1986
filing date -
Jun 2, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A pressure transducer, which includes a silicon diaphragm with ion-implanted resistors in Wheatstone Bridge configuration and in insulating layer covering the diaphragm, is provided with temperature compensation for differences in thermal expansion coefficients of the layers by depositing a layer of aluminum onto the central portion of the diaphragm.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully