Method of producing diamond-like carbon-coatings
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United States of America Patent
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-
Mar 1, 1988
Grant Date -
N/A
app pub date -
Dec 13, 1985
filing date -
Jun 12, 1984
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Diamond-like, transparent, clear and uncolored carbon coatings with low internal stresses are generated on substrates by plasma discharge from the gas phase. For this purpose, a hydrocarbon gas or a mixture of hydrocarbon gases and pure hydrogen is admitted onto the substrate to be coated which is at room temperature. Around the substrate an oxygen-free plasma discharge is produced by high-frequency excitation which is sustained by the gases admitted. The gases are excited, dissociated ionized and accelerated toward the substrate during plasma discharge.
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