Importance

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Abstract

A multipoint microwave coaxial probe card which has a printed circuit (20) with an edge connector (24) and a mounting ring (30) attached to the surface. A series of ceramic stripline needle assemblies (38) are bonded to the board around a hole (22) in the center of the board for compliance with the pads on the component under test. Microwave connectors (34) are mounted into the ring with coaxial cable (42) electrically connecting to the needle assemblies. A portion of the needle assemblies are joined to the edge connector by insulated wires (44) allowing both high and low frequency signals to be utilized simultaneously. A shield in the form of a flat plate (48), with a cover (54), enclose the ring and provide RFI and EMI shielding. The coaxial probe card fulfills the need to provide shielded dual frequency testing of microwave semi-conductor wafers heretofore unavailable.

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First Claim