Capacitance type displacement measuring instrument
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United States of America Patent
Stats
-
Mar 22, 1988
Grant Date -
N/A
app pub date -
Oct 26, 1984
filing date -
Oct 27, 1983
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A capacitance type displacement measuring instrument is disclosed in which a change in electric capacity between electrodes due to a change in displacement between two members movable relative to each other is detected on the basis of a change in phase of a detection signal and a displacement value between the two members is measured from the change in the capacity. AC signals are successively applied to transmitting electrodes provided on one of the members at a predetermined pitch by a multiplexer and signals induced in transfer electrodes at a predetermined pitch differing from the aforesaid pitch of the transmitting electrodes are received by pickup electrodes provided on the aforesaid one of the members. The relative displacement is detected from a change in phase of a received signal of substantially triangular waveform, which are obtained by the pickup electrode.
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