Silicon nozzle structures and method of manufacture
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United States of America Patent
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Mar 29, 1988
Issued Date -
N/A
app pub date -
Oct 24, 1986
filing date -
Oct 15, 1984
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A nozzle structure in a crystallographically oriented, monocrystalline silicon includes a pyramidal opening anisotropically etched from the entrance side of the nozzle and truncated in a membrane having a smaller cross-section than the initial cross-section of the entrance opening. The membrane has extending therethrough a pyramidal opening etched anisotropically from the exit side. The vertical axes of both openings are substantially concentric.
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