Importance

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Abstract

A corrosion proof differential pressure transducer includes a central disk and two thin diaphragms mounted close to but spaced from the disk on both sides thereof, with the diaphragms being intercoupled to move together. This may be accomplished, for example, by a rod passing through a hole in the center of the central disk which is secured to each of the diaphragms; or by a fluid such as silicone oil in the space between the diaphragms and flowing through one or more holes through the central disk. At least one of the diaphragms, the central disk and the rod (when one is used) are formed of alumina, quartz, or other inert, insulating material having substantially zero mechanical hysteresis. One of the diaphragms may be a thin, tough, flexible insulating membrane. Conductive plates providing variable capacitance with changes in pressure may be mounted on the inner surface one or both of the diaphragms and on the facing surface of the central disk. Alternatively, resistive elements bonded to the inner surfaces of the diaphragms may be employed as the pressure sensing elements, as their resistance changes with flexing of the diaphragms. A housing and associated gaskets direct pressures from two different fluids to the two diaphragms, so that the differential pressure is measured.

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First Claim