Importance

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Abstract

A carrier system which carries electronic parts mounted on an arm to arbitrary positions within a clean room is disclosed. This carrier system is arranged such that: a screw shaft is perpendicularly provided in a rotationally drivable manner between an upper plate and a bottom plate which are vertically connected through a plurality of guide bars to each other; a movable plate is so disposed as to be vertically movable by the rotation of the screw shaft and is guided by the guide bars in a vertically slidable manner between the upper plate and the bottom plate; a cylindrical member is perpendicularly so provided on the movable plate as to be rotationally drivable which penetrates the upper plate and protrudes upwards; a horizontal moving member is fixed to an upper end of the cylindrical member; a carriage equipped with the arm is so disposed as to be horizontally movable on the horizontal moving member; and a driving wire spanned between pulleys which are axially supported within the horizontal moving member is secured to the carriage. Hence, it is feasible to carry the electronic parts like a silicon wafer in three dimensions within the clean room and to transfer the electronic parts to arbitrary positions with high efficiency without deteriorating the cleanness in the clean room.

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First Claim