US Patent No: 4,738,910

Number of patents in Portfolio can not be more than 2000

Method of applying a resist

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Abstract

A photoresist process which comprises a process for spin-coating a substrate with a resist, a process for transferring a mask pattern onto the coated resist film followed by exposure, and a developing process for forming a pattern on the substrate after the pattern has been exposed. When the developed pattern of the resist pulsates with the increase or decrease of parameters in the process for applying resist, the value of the parameter is set to a value that corresponds to an extreme value of the pulsation.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
HITACHI, LTD.TOKYO32382

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ito, Tetsuo Ogasa-gun, JP 52 511
Kadota, Kazuya Hinode-machi, JP 5 85
Kobayashi, Kazunari Kawasaki, JP 62 242
Nakagomi, Yoshiyuki Kokubunji, JP 4 20
Tanuma, Masaya Yokohama, JP 2 24

Cited Art

Patent Info (Count) # Cites Year
 
TOKYO SHIBAURA DENKI KABUSHIKI KAISHA (1)
4,500,615 Wafer exposure method and apparatus 17 1982

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
TOKYO ELECTRON LIMITED (4)
5,393,624 Method and apparatus for manufacturing a semiconductor device 116 1992
6,221,787 Apparatus and method of forming resist film 24 1999
6,410,194 Resist film forming method and resist coating apparatus 11 2000
6,620,244 Resist film forming method and resist coating apparatus 10 2002
 
AT&T BELL LABORATORIES (1)
5,320,918 Optical lithographical imaging system including optical transmission diffraction devices 14 1993
 
EASTMAN KODAK COMPANY (1)
4,971,931 Diffuser features for spin-coated films 1 1990
 
LUCENT TECHNOLOGIES INC. (1)
RE35753 Optical lithographical imaging system including optical transmission diffraction devices 6 1996
 
NATIONAL SEMICONDUCTOR CORPORATION (1)
5,622,747 Method for dispensing a layer of photoresist on a wafer without spinning the wafer 9 1995
 
X-FAB SEMICONDUCTOR FOUNDRIES AG (1)
6,531,264 Integrated circuit manufacture 0 2000