US Patent No: 4,741,354

Number of patents in Portfolio can not be more than 2000

Radial gas manifold

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ATTORNEY / AGENT: (SPONSORED)
 

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Abstract

An improved radially designed gas manifold is disclosed for the precise mixing and admission of a plurality of gases into a processing chamber, and being characterized by rapid switching from one gas to another or from one set of gas mixture to another set of gas mixture, and yet occupying a minimum of dead space. The radial gas manifold includes a body provided with an axial mixing channel and a plurality of gas conduits formed in the body in parallel spaced relation to the mixing channel and connected thereto. A pair of annular ducts also are formed in the body adjacent its respective ends, with one of the pair connected to both the mixing channel and to each of the gas conduits, and the other of the pair connected to each of the gas conduits and being vented. A pair of valves are mounted in tandem for each of the gas conduits and means are provided to alternately open and close one of the pair of valves.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
SPIRE CORPORATIONBEDFORD, MA62

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DeMild, Jr Leonard C Peabody, MA 1 43

Cited Art

Patent Info (Count) # Cites Year
 
CALIFORNIA INSTITUTE OF TECHNOLOGY (1)
4,558,845 Zero dead volume valve 45 1982
 
SPIRE CORPORATION (1)
4,596,208 CVD reaction chamber 22 1984
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (1)
4,597,412 Valve for sequential chemical operations 33 1985

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
SWAGELOK COMPANY (8)
6,644,353 Modular surface mount manifold 17 2001
7,048,007 Modular surface mount manifold assemblies 1 2002
6,776,193 Modular surface mount manifold 13 2003
7,036,528 Modular surface mount manifold assemblies 1 2003
6,938,644 Modular surface mount manifold 3 2003
7,195,037 Modular surface mount manifold 0 2005
7,686,041 Modular surface mount manifold assemblies 0 2006
7,404,417 Modular surface mount manifold 1 2007
 
OHMI, TADAHIRO (5)
4,917,136 Process gas supply piping system 39 1988
5,850,853 Fluid control system and valve to be used therein 8 1996
5,975,112 Fluid control device 23 1997
6,408,879 Fluid control device 4 1998
6,257,270 Fluid control device 21 1999
 
AEROQUIP CORPORATION (3)
5,863,023 Valved coupling for ultra high purtiy gas distribution system 22 1997
6,035,609 Ultra high purity gas distribution component with integral valved coupling and methods for its use 10 1998
5,924,447 Ultra high purity gas distribution component with integral valved coupling and methods for its use 3 1998
 
APPLIED MATERIALS, INC. (3)
6,123,097 Apparatus and methods for controlling process chamber pressure 4 1996
7,066,194 Valve design and configuration for fast delivery system 34 2002
7,228,873 Valve design and configuration for fast delivery system 29 2006
 
U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL TRUSTEE (3)
5,497,316 Process gas distribution system and method 56 1995
5,657,786 Zero dead-leg gas control apparatus and method 22 1996
5,794,659 Zero dead-leg valve structure 1 1996
 
METHODE MASSACHUSETTES, LLC (NOW KNOWN AS) (2)
5,116,455 Process of making strain-free, carbon-doped epitaxial layers and products so made 33 1991
5,231,298 GaAs device having a strain-free c-doped layer 23 1992
 
NORTHROP GRUMMAN SYSTEMS CORPORATION (2)
7,460,566 Laser power reduction without mode change 1 2006
7,586,958 Electro-opto switching of unpolarized lasers 0 2006
 
AFFYMAX TECHNOLOGIES N.V. (1)
5,655,560 Clog-free valving system 6 1994
 
AIR PRODUCTS AND CHEMICALS, INC. (1)
5,137,047 Delivery of reactive gas from gas pad to process tool 47 1990
 
CHEMAND CORPORATION (1)
6,543,483 Fluid handling port array 1 2001
 
CKD CORPORATION (1)
5,819,782 Gas supply unit 61 1996
 
CP PACKAGING, INC. (1)
7,596,933 Dual actuator cylinder assembly 0 2005
 
HONEYWELL INTERNATIONAL INC. (1)
6,819,430 Manifold for processing a stacked array of laser block assemblies 0 2001
 
KABUSHIKI KAISHA TOSHIBA (1)
5,368,062 Gas supplying system and gas supplying apparatus 54 1993
 
KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH (1)
4,989,637 Gas mixing apparatus 14 1989
 
LAM RESEARCH CORPORATION (1)
6,283,143 System and method for providing an integrated gas stick 5 2000
 
MEMRON, INC. (1)
4,930,538 Compact manifold valve 20 1989
 
MICRON TECHNOLOGY, INC. (1)
7,699,932 Reactors, systems and methods for depositing thin films onto microfeature workpieces 0 2004
 
MITSUBISHI DENKI KABUSHIKI KAISHA (1)
6,022,811 Method of uniform CVD 7 1997
 
NORTHROP GRUMMAN CORPORATION (1)
6,026,109 High-power, solid-state laser in a cylindrical package 16 1998
 
NUMATICS, INCORPORATED (1)
7,533,684 Dispensing valve with back flow protection 0 2005
 
SMITHKLINE BEECHAM CORPORATION (1)
6,165,778 Reaction vessel agitation apparatus 47 1998
 
TEISAN KABUSHIKI KAISHA (1)
5,727,589 Gas supply system equipped with cylinders 13 1994
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (1)
6,240,943 Method and apparatus for maintaining a constant ratio of gases in a mixture subject to steady state and intermittent flow conditions 25 1999