Automatic developing apparatus
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United States of America Patent
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-
May 17, 1988
Grant Date -
N/A
app pub date -
Nov 17, 1986
filing date -
Nov 18, 1985
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An automatic developing apparatus comprises a developing tank and a pipe for introducing a developing solution into the developing tank. The developing tank is constituted by a stage on which a substrate is to be set, and a processing case movable relative to the stage, to receive said stage.
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Cited Art Landscape
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