Chemical vapor deposition of zinc oxide films and products
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United States of America Patent
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Jun 14, 1988
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N/A
app pub date -
Mar 12, 1987
filing date -
Jun 4, 1985
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Expired
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Abstract
Zinc oxide is applied to a substrate at a low temperature by using a mixture of an organozinc compound and water carried in an inert gas. The resulting zinc oxide film has a relatively low resistivity which can be varied by addition of a group III element.
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