Wafer prober and a probe card to be used therewith
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 5, 1988
Grant Date -
N/A
app pub date -
Jun 12, 1985
filing date -
Jun 15, 1984
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probing apparatus for use in examination of a chip formed on a wafer, the probing apparatus including a holder for holding the wafer, a support for supporting a sheet-like member having a probe to be contacted to the chip on the wafer, a driving unit for displacing the wafer relative to the sheet-like member, and a detecting system for reading a record carried on the sheet-like member. In another aspect of the invention, there is provided a probe card for use in examination of a tip formed on a wafer, the probe card including a flat plate member having an aperture, a plurality of fine conductive members each extending from a peripheral portion of the flat plate member around the aperture toward a central portion of the aperture, each of the fine conductive members having a free end extending beyond one of the surfaces of the flat plate member, and a record carried on the flat plate member and capable of being sensed from a sensor disposed opposed to the one surface.
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