Apparatus for removing organic substance from substrate
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United States of America Patent
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-
Jul 12, 1988
Grant Date -
N/A
app pub date -
Oct 15, 1986
filing date -
Oct 28, 1985
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for removing organic substances from a substrate, including ultraviolet lamps provided above a horizontal hot plate on which a substrate is placed; an ozone blow-off pipe which blows ozone downward, provided at a position appropriately distant from the surface of the hot plate on which the substrate is placed, the ozone blow-off pipe being so arranged as to be reciprocated relative and parallel to the surface of the hot plate.
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