Resin encapsulated semiconductor device

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United States of America Patent

PATENT NO 4758875
SERIAL NO

06266198

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Abstract

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Disclosed is a resin encapsulated semiconductor memory device comprising a semiconductor memory element, a package encapsulating the memory element and an .alpha.-rays shielding layer made from a water-resistant aromatic polyimide polymer, interposed between the memory element and the package, the aromatic polyimide polymer having a saturated water absorption rate of 1% or less. The polyimide polymer is exemplified as the polymer having the following recurring units: ##STR1## wherein R is an aliphatic or aromatic group; R.sub.1 and R.sub.2 are independently a hydrogen atom, an alkyl group having 1 to 4 carbon atoms or CF.sub.3 ; and R.sub.3 to R.sub.6 are independently a hydrogen atom, a halogen atom or an alkyl group having 1 to 4 carbon atoms. The disclosure is also concerned with resin encapsulated semiconductor devices in which the aromatic polyimide polymer of low water absorption is used as an insulating layer or passivation film.

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Patent Owner(s)

  • HITACHI CHEMICAL COMPANY, LTD.;HITACHI, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujisaki, Koji Hitachi, JP 22 278
Komaru, Takeshi Tachikawa, JP 5 440
Makino, Daisuke Hitachi, JP 58 692
Nishikawa, Akio Hitachi, JP 12 174
Numata, Shunichi Hitachi, JP 20 318
Suzuki, Hiroshi Hitachi, JP 973 13737

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