Transporting device with roller systems for vacuum-coating installations

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United States of America Patent

PATENT NO 4765273
SERIAL NO

06912355

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Abstract

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Transporting device for vacuum coating installations with several stations and with roller systems (3, 4) for the guidance and advance of essentially two-dimensional substrate holders (1) in a vertical position along a given transporting path through the stations. To avoid interference with the coating process by falling layer material, the substrate holders (1) are guided exclusively in the area of their lower edge (2) by roller systems (3, 4). In a preferred example of the operation, guide rollers are disposed in pairs in the area of the lower edge (2) of the substrate holders (1), the substrate holder (1) being held between said guide rollers. The guide rollers (5, 6) are rotatable about vertical axes A1, A2.

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Patent Owner(s)

Patent OwnerAddress
LEYBOLD AKTIENGESELLSCHAFTWILHELM-ROHN-STR 25 D-6450 HANAU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anderle, Friedrich Hanau am Main, DE 8 221

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