Electrostatic capacitive pressure sensor
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United States of America Patent
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Sep 6, 1988
Grant Date -
N/A
app pub date -
Dec 1, 1987
filing date -
Dec 12, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electrostatic capacitive pressure sensor having two silicon diaphragms electrostatically bonded to opposite faces of an insulating member to form two measuring chambers. A silicon base is coupled to the first diaphragm to form a pressure chamber. The insulating member is provided with a through-hole electrode. The electrode and the two silicon diaphragms are operative to measure pressure in the pressure chamber by measuring changes in capacity in the measuring chambers.
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