Surface inspection apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 20, 1988
Grant Date -
N/A
app pub date -
Dec 18, 1984
filing date -
Dec 18, 1984
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In the surface inspection apparatus disclosed herein, an elongate array of electro-optical shutters is interposed between a laser beam which scans across the surface to be inspected and a photodetector system which collects light scattered from the surface along the scan line. The shutters are operated in a shifting pattern in synchronism with the scanning means thereby to block unwanted regular signal components.
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