Wafer handler
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United States of America Patent
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-
Sep 27, 1988
Grant Date -
N/A
app pub date -
May 22, 1987
filing date -
May 22, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer handling technique allows for picking up a wafer from its front side. One or more vacuum ports pull the periphery of the wafer into contact with a ledge raised from a broad surface, providing a friction force that prevents lateral movement of the wafer. A port in the broad surface of the handler flows pressurized gas onto the wafer, thereby preventing contact between the handler and the interior of the wafer. The handler may be sized to be relatively thin, and to cover less than half of the surface of the wafer, thereby allowing for readily loading wafers back-to-back in a furnace boat.
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