Importance

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Abstract

A pressure sensor comprises an improved capacitive pressure transducer having a first capacitor plate secured to a limited portion of a first surface of a relatively rigid ceramic substrate and having a diaphragm with an electrically conductive surface forming a second capacitor plate, the diaphragm being secured to the ceramic substrate at a location spaced inwardly from the periphery of that first substrate for disposing the second capacitor plate in spaced, overlying relation to the first capacitor plate to be movable in response to applied pressure for varying the capacitor formed by the plates. Support means bear against opposite surfaces of the ceramic substrate at the periphery of the substrate for mounting the transducer with the diaphragm thereof substantially free of mounting stresses to be exposed to a pressure force in a pressure zone to be monitored.

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First Claim