Preparation of silicon and germanium hydrides containing two different group 4A atoms
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United States of America Patent
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Oct 11, 1988
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N/A
app pub date -
Feb 18, 1986
filing date -
Feb 18, 1986
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Expired
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Abstract
A method for preparing a hydride containing at least two different Group 4A atoms wherein at least one of the Group 4A atoms is silicon or germanium. The method includes the steps of reacting an alkali metal and a macrocyclic compound with a silicon or germanium hydride to form a salt. The salt is then reacted with a Group 4A halide. The resulting hydrides are useful as deposition feedstock material for use in the formation of hydrogenated amorphous silicon alloy in the fabrication of photovoltaic devices and other semiconductor devices.
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