Back reflection monitor and method
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United States of America Patent
Stats
-
Oct 11, 1988
Grant Date -
N/A
app pub date -
Aug 18, 1987
filing date -
Aug 18, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A beam monitor comprises a mirror for reflecting an incident beam of radiation to a target and for receiving a reflected beam from the target and has a surface on which the beams impinge. Incident and reflected beam channels are orthogonally disposed within the mirror. Each of the channels has an opening disposed in the surface for admitting the associated beam thereto. First and second detectors are operably associated with the mirror and each generates a signal indicative of a selected characteristic of the beam illuminating the associated channel. A controller compares the generated signals and thereby monitors at least one selected characteristic of the target or of the beam.
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