Photoeletric type measuring method and device

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United States of America Patent

PATENT NO 4778271
SERIAL NO

07025619

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Abstract

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In a photoelectric type measuring method and device wherein a workpiece to be measured is scanned by parallel scanning ray beams for scanning in one direction, aforesaid ray beams after the scanning are received by light receiving elements and a time length of a dark portion or a bright portion generated due to the obstruction of a portion of the ray beams by workpiece to be measured in response to output signals from the light receiving elements is detected so as to obtain the dimension in the scanning direction of the workpiece to be measured, the aforesaid ray beams are split into ray beams polarized in directions different from each other, the workpiece to be measured is scanned in such a condition that the two ray beams are relatively shifted so that the two ray beam may be partially overlapped in the scanning directions thereof and light receiving signals corresponding to the two ray beams after the scanning are processed to detect and edge of the workpiece to be measured.

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Patent Owner(s)

Patent OwnerAddress
MITUTOYO MFG CO LTD 33-19 SHIBA 5-CHOME MINATO-KU TOKYO JAPANNot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hamada, Hiroyoshi Kanagawa, JP 8 101
Kuwabara, Yoshiharu Kanagawa, JP 7 100
Kuwata, Masayuki Kanagawa, JP 21 229

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