US Patent No: 4,778,560

Number of patents in Portfolio can not be more than 2000

Method for production of thin film transistor array substrates

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Abstract

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A method of production of active matrix display substrates using thin film transistors and more particularly to a method for production of substrates for liquid-crystal display use. The active matrix substrate using the thin film transistor is produced by the mask processes of smaller number. The process of the present invention can reduce the number of the masks, by one, of the active matrix substrate using the inverted staggered thin film transistor which requires the masks from five levels to six levels. Further improvements reduce the number of the masks to four levels from three levels, thus contributing greatly towards lower cost, improved yield.

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First Claim

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Patent Owner(s)

  • MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawaguchi, Takao Hirakata, JP 5 142
Nagata, Seiichi Sakai, JP 24 527
Nanno, Yutaka Neyagawa, JP 15 431
Okawa, Noriko Osaka, JP 1 76
Takeda, Etsuya Suita, JP 11 346

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (3)
* 4,514,253 Manufacture of thin film transistor 32 1983
* 4,624,737 Process for producing thin-film transistor 106 1985
* 4,654,117 Method of fabricating a thin film transistor array 37 1986
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (90)
* 4,955,697 Liquid crystal display device and method of driving the same 72 1988
* 4,918,494 Thin film transistor 6 1989
* 5,032,536 Method for manufacturing a liquid crystal display device with thin-film-transistors 30 1989
* 5,034,340 Amorphous silicon thin film transistor array substrate and method for producing the same 23 1989
* 5,032,531 Method of manufacturing active matrix panel 77 1989
* 5,054,887 Active matrix type liquid crystal display 97 1989
* 5,366,912 Fabrication method of thin-film transistor 30 1989
* 5,175,114 Method for production of a bidirectional nonlinear resistor, active matrix liquid crystal panel using bidirectional nonlinear resistor 4 1990
* 5,236,573 MIM devices, their method of fabrication and display devices incorporating such devices 15 1990
* 5,065,202 Amorphous silicon thin film transistor array substrate and method for producing the same 8 1990
* 5,075,237 Process of making a high photosensitive depletion-gate thin film transistor 31 1990
* 5,121,177 Silicon thin film transistor 3 1990
* 5,121,178 Silicon thin film transistor 2 1990
* 5,075,244 Method of manufacturing image sensors 33 1990
* 5,159,477 Active matrix display device having additional capacitors connected to switching elements and additional capacitor common line 42 1990
* 5,196,911 High photosensitive depletion-gate thin film transistor 9 1991
* 5,238,861 Method for manufacturing an active matrix display screen with storage capacitors 43 1991
* 5,182,661 Thin film field effect transistor array for use in active matrix liquid crystal display 88 1991
* 5,231,039 Method of fabricating a liquid crystal display device 66 1991
* 5,132,745 Thin film transistor having an improved gate structure and gate coverage by the gate dielectric 27 1991
* 5,270,229 Thin film semiconductor device and process for producing thereof 37 1992
* 5,331,447 TFT active matrix liquid crystal display devices with plural TFTs in parallel per pixel 40 1992
* 5,212,574 Active matrix board having double-layer scan lines and capacity lines with discontinuous lower scan lines and lower capacity lines 36 1992
* 5,362,660 Method of making a thin film transistor structure with improved source/drain contacts 74 1992
* 5,320,973 Method of fabricating a thin-film transistor and wiring matrix device 27 1993
* 5,305,128 Active matrix electro-optic display device with storage capacitors and projection color apparatus employing same 18 1993
* 5,929,463 Active matrix electro-optic display device with storage capacitors and projection color apparatus employing same 6 1994
* 5,528,396 TFT active matrix liquid crystal display devices with a holding capacitance between the pixel electrode and a scanning signal line 34 1994
* 6,235,546 Method of forming an active matrix electro-optic display device with storage capacitors 1 1994
* 5,478,766 Process for formation of thin film transistor liquid crystal display 119 1995
* 5,610,738 Method for making LCD device in which gate insulator of TFT is formed after the pixel electrode but before the video signal line 28 1995
* 5,532,850 TFT active matrix liquid crystal display with gate lines having two layers, the gate electrode connected to the wider layer only 39 1995
* 5,637,187 Light valve device making 93 1995
* 5,728,592 Method for fabricating a thin film transistor matrix device 18 1995
* 5,671,027 LCD device with TFTs in which pixel electrodes are formed in the same plane as the gate electrodes with anodized oxide films and before the deposition of the silicon gate insulator 30 1995
* 5,879,973 Method for fabricating thin-film transistor 16 1995
* 5,708,484 TFT active matrix liquid crystal display devices with two layer gate lines, the first being the same level and material as gate electrodes 33 1996
* 6,008,065 Method for manufacturing a liquid crystal display 118 1996
* 6,208,400 Electrode plate having metal electrodes of aluminum or nickel and copper or silver disposed thereon 9 1997
* 5,953,583 Manufacturing method of a thin-film transistor 10 1997
* 5,838,399 TFT active matrix liquid crystal display devices with two layer gate lines, the first being the same level as gate electrodes. 22 1997
* 5,994,173 Thin film transistor matrix device and method for fabricating the same 9 1997
6,338,990 Method for fabricating thin-film transistor 15 1998
* 6,184,963 TFT active matrix LCD devices employing two superposed conductive films having different dimensions for the scanning signal lines 6 1998
6,184,964 Electrode plate with two-layer metal electrodes including copper or silver layer, and flattened anti-oxidation and insulating layers 4 1999
6,331,443 Method for manufacturing a liquid crystal display 14 1999
* 6,514,804 Thin-film transistor and fabrication method thereof 10 2000
* 6,559,920 Liquid crystal display device and method of manufacturing the same 8 2000
6,384,879 Liquid crystal display device including thin film transistors having gate electrodes completely covering the semiconductor 9 2000
6,661,026 Thin film transistor substrate 5 2002
6,839,098 TFT active matrix liquid crystal display devices 10 2002
* 2002/0080,295 TFT active matrix liquid crystal display devices 0 2002
* 6,890,783 Active matrix substrate plate and manufacturing method therefor 13 2002
* 2003/0013,221 Active matrix substrate plate and manufacturing method therefor 4 2002
* 6,818,923 Thin film transistor array substrate and manufacturing method thereof 19 2002
* 2003/0197,187 Thin film transistor array substrate and manufacturing method thereof 4 2002
6,862,051 Liquid crystal display device and method of manufacturing the same 4 2003
* 7,098,091 Method for fabricating thin film transistors 1 2004
* 2005/0186,719 Method for fabricating thin film transistors 0 2004
7,416,907 Semiconductor device and method for forming the same 4 2004
* 7,022,557 Thin film transistor array substrate and manufacturing method thereof 4 2004
* 7,084,017 Liquid crystal display 10 2004
* 2005/0082,527 Liquid crystal display 1 2004
6,992,744 TFT active matrix liquid crystal display devices 8 2004
* 2005/0068,485 TFT active matrix liquid crystal display devices 0 2004
* 7,329,906 Semiconductor device and method for forming the same 4 2004
* 7,468,527 Liquid crystal display device and fabricating method thereof 5 2005
* 2005/0263,768 Liquid crystal display device and fabricating method thereof 4 2005
* 7,760,309 Transflective liquid crystal display device and fabricating method thereof 4 2005
* 8,018,545 Method of fabricating a liquid crystal display device 0 2005
* 7,932,979 Method for fabricating a liquid crystal display device wherein the storage electrode is simultaneously formed with the active pattern 0 2005
* 2006/0044,485 Liquid crystal display device and fabrication method thereof 3 2005
7,196,762 TFT active matrix liquid crystal display devices 8 2005
* 2006/0028,605 TFT active matrix liquid crystal display devices 0 2005
* RE41363 Thin film transistor substrate 3 2005
7,423,290 Electro-optical device and driving method for the same 6 2006
* 2006/0151,792 Electro-optical device and driving method for the same 0 2006
7,450,210 TFT active matrix liquid crystal display devices 4 2006
* 2006/0268,212 TFT active marix liquid crystal display devices 3 2006
* 7,649,582 Array substrate for a liquid crystal display device having multi-layered metal line and fabricating method thereof 5 2007
* 2007/0273,805 Array substrate for a liquid crystal display device having multi-layered metal line and fabricating method thereof 2 2007
* 8,110,452 Liquid crystal display device and manufacturing method thereof 0 2007
* 7,755,088 Liquid crystal display 8 2008
8,026,886 Electro-optical device and driving method for the same 0 2008
8,106,867 Electro-optical device and driving method for the same 0 2008
8,017,462 Method of making a liquid crystal display device capable of increasing capacitance of storage capacitor 1 2008
* 2009/0085,040 Liquid crystal display device and fabricating method thereof 3 2008
* 2009/0174,829 LIQUID CRYSTAL DISPLAY APPARATUS 3 2009
7,995,154 Array substrate for a liquid crystal display device having multi-layered metal line and fabricating method thereof 0 2009
8,072,565 Transflective liquid crystal display device 1 2010
* Cited By Examiner