Leak detector and leak detection method
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United States of America Patent
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-
Oct 25, 1988
Grant Date -
N/A
app pub date -
Oct 15, 1987
filing date -
Mar 27, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Leak detector operating according to the countercurrent principle is used in a leak detection method and includes a first high vacuum pump having an inlet which is connected to an inlet of the leak detector, a second high vacuum pump having an inlet which is connected to a mass spectrometer, and a first roughing pump having an inlet which is connected to the outlets of the first and second high vacuum pump respectively. In order, on the one hand, to detect particularly large leaks and, on the other hand, avoid overloads due to high test gas concentrations, a second roughing pump is provided having an inlet which may be selectably connected to one of the inlet of the leak detector via a conduit equipped with a control valve and to the inlet of the first roughing pump by way of a conduit equipped with a choke.
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