Optical position measuring apparatus

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United States of America Patent

PATENT NO 4782239
SERIAL NO

06846950

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Apparatus for measuring the distance to an object comprising projection means for projecting a radiation beam onto the object including a radiation generating means and a first optical system, and detection means for detecting the radiation beam reflected from the object including radiation detecting means having a radiation-receiving surface for detecting the intensity distribution of the radiation on said radiation-receiving surface and a second optical system for guiding at least a portion of the reflected radiation beam from the object to said radiation-receiving surface, an optically conjugated relation being held between said radiation-receiving surface and an area of the optical axis of the first optical system.

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Patent Owner(s)

  • NIKON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hamada, Tomohide Kawasaki, JP 41 693
Hirose, Hideo Kawaguchi, JP 27 536

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