Particle detector for flowing liquids with the ability to distinguish bubbles via photodiodes disposed 180.degree. apart
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United States of America Patent
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Nov 8, 1988
Grant Date -
N/A
app pub date -
Feb 10, 1987
filing date -
Feb 10, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A system for detecting contaminant particles in a liquid, such as used for processing wafers during the manufacture of integrated circuits, distinguishes non-contaminant bubbles generally found in liquids from contaminant particles. The system provides a controlled laminar fluid flow of the liquid through a pipe, and the substantially spherical bubbles in the flow path are detected by symmetrically spaced photodiodes. The irregularly shaped contaminant particles are detected, whereas the presence of bubbles are negated by the detection system by virtue of the balanced photodiode assembly.
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