Absolute capacitance manometers

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United States of America Patent

PATENT NO 4785669
SERIAL NO

07050898

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A single fluid-pressure transducer unit, of the type in which sensed electrical capacitance is varied in accordance with electrode deflections induced by pressure changes, is rendered capable of characterizing a wide range of pressures extending from near-vacuum to atmospheric levels, with the aid of a distinctive composite-electrode capsule which interacts uniquely with a conventional type of sheet-metal diaphragm. While sensing relatively low pressures, the exhibited capacitance of the transducer is essentially that appearing between the diaphragm and a nearby electrode carried by the capsule, but, at or near atmospheric pressure, the diaphragm physically engages and deflects that electrode, which is elastically deformable, causing it to vary a further capacitance appearing between that deformable electrode and a companion stationary electrode which is also part of the capsule.

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Patent Owner(s)

  • MKS INSTRUMENTS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Benson, Richard A Bedford, MA 13 265
Denner, John A Lynn, MA 2 141

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