High frequency discharge apparatus with impedance matching
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United States of America Patent
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-
Dec 6, 1988
Grant Date -
N/A
app pub date -
Mar 19, 1987
filing date -
Mar 19, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a high-frequency discharge apparatus utilizing a discharge tube positioned between an electrode and a ground plane, the electrode is shaped so as to increase the uniformity of the electric field across the discharge tube. Furthermore, a transmission line is formed between a conductor connected to the electrode and the ground plane, and impedance matching in the transmission line is provided by metal and/or dielectric tuning slugs inserted between the conductor and the ground plane.
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