Fast method of measuring phosphorous concentration in PSG and BPSG films
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United States of America Patent
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Dec 13, 1988
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N/A
app pub date -
Aug 4, 1987
filing date -
Aug 4, 1987
priority date (Note) -
Expired
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Abstract
A method of measuring the phosphorus concentration in phosphosilicate and borophosphosilicate films using infrared spectroscopy in conjuction with derivative spectroscopic techniques. This method is easily adapted for use with a Fourier Transform spectrometer. A spectrum of the film is taken with a dual beam infrared spectrometer. The second derivative of the spectrum is plotted to rersolve close peaks. Amplitudes of the P.dbd.O band at 1316 cm.sup.-1 and the O--Si--O band at 818 cm.sup.-1 are measured. A ratio between these amplitudes is calculated. The ratio is then matched to a calibration curve to determine the phosphorus concentration.
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