System for detection of extremely small particles in a low pressure environment
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United States of America Patent
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Dec 20, 1988
Grant Date -
N/A
app pub date -
Oct 27, 1987
filing date -
Oct 27, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A system for detection of extremely small particles in a low pressure environment or vacuum includes a vapor column in which a diffusion oil is vaporized, a saturation column in which vaporized oil is cooled and supersaturated, and means for directing a low pressure gas into the saturation column. An optical detector senses the oil droplets that grow around extremely small particles which are introduced in the saturation column by the gas and fall past the detector.
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