Importance

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Abstract

A strain sensitive element for use in a system for converting mechanical movement of relatively movable portions of the element into electrical signals, includes a substantially planar substrate comprising an N-type silicon crystal material wherein the substrate includes one or more grooves extending into the substrate defining an integral hinge portion between at least two relatively movable parts. At least one unitary strain gage extends across a groove without any separate support so that the strain gage and the hinge portion are spaced apart. The strain gage is a unitary member derived from the same silicon crystal material of the substrate and comprises P-type silicon material. The strain gage is joined to two of the relatively movable parts of the substrate. At least one unitary conductor extends across a groove without separate support so that the conductor and the hinge portion are spaced apart. The conductor is derived from the same silicon material as the substrate and comprises P-type silicon material. The conductor is oriented substantially transversely with respect to the strain gage. The conductor is joined to two of the relatively movable parts of the substrate. Contacts, electrically connected to the strain gage and the conductor, are provided for allowing electrical communication with test apparatus for measuring changes in electrical resistance in the strain gage when the strain gage is subject to stress resulting from relative movement of the movable parts of the substrate.

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First Claim