Laser pattern generation apparatus

United States of America Patent

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Jan 3, 1989
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Mar 28, 1988
filing date
Jul 24, 1985

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Expired

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Abstract

A laser pattern generation apparatus particularly suited for semiconductor applications. The laser beam is split into a plurality of beams and modulated with acousto-optic modulators. A rotating mirror having a plurality of facets causes the beam to scan the workpiece.

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APPLIED MATERIALS, INC.;CONNECTICUT NATIONAL BANK, THE A NATIONAL BANKING ASSOCIATION

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Inventor Name	Address	# of filed Patents	Total Citations
Allen, Paul C	Beaverton, OR	29	709
Warkentin, Paul A	Aloha, OR	4	294

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Laser pattern generation apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

07178868

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PATENT NO	4796038
SERIAL NO	07178868
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07178868

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