Double wall fast cool-down furnace
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United States of America Patent
Stats
-
Feb 7, 1989
Grant Date -
N/A
app pub date -
Jan 8, 1987
filing date -
Jan 8, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
One fast cool-down furnace embodiment discloses a double wall in the interspace of which a cooling air stream is flowable to provide fast cool-down of a load of wafers. The double wall embodiment is retrofittable on existing diffusion furnaces, and includes a cylindrical member aligned in concentric relation with the diffusion tube by combination plenum defining and supporting manifolds. In a second embodiment, the fast cool-down furnace includes a reaction vessel and a heating core relatively movable relative to each other in such a way that in a fast cool-down condition the core and reaction vessel are spaced apart. Cooling tubes are embedded in the movable core. Fans or other aids to cooling are provided. Operation is either in a controlled cool-down mode or in a quick quench mode.
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