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Abstract

An accelerometer comprising a frame having an input axis (y) and a cross axis (x) orthogonal to and co-planar with the input axis. The accelerometer has a flexible beam coupled to a proofmass. The beam is supported at a pivot location. A rotator coupled to the frame provides a restoring force having a first or second polarity to the beam. The restoring force is applied in a direction parallel to the input axis (y) to restore the proofmass to a reference position in response to an absence of acceleration along the input axis. A position signal sensor provides an error signal proportional to the displacement of the proofmass from the reference position. A servo responds to the error signal by applying a drive signal to the rotator which applies a restoring force to the flexible beam to restore the proofmass to its reference position. A boundary acoustic wave device on the flexible beam surface responds to strain in the flexible beam by providing an output signal having an output frequency responsive to the boundary acoustic velocity of a wave in the boundary acoustic wave device.

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First Claim