Ion implantation surface charge control method and apparatus
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United States of America Patent
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Feb 14, 1989
Grant Date -
N/A
app pub date -
Jan 11, 1988
filing date -
Jan 11, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An ion beam neutralizer. High energy electrons are directed through an ion beam neutralizing zone or region containing an ionizable gas. As the high energy electrons collide with the gas molecules, they ionize the gas molecules and produce low energy electrons which are trapped by a positively charged ion beam. As high energy electrons pass out of the neutralizing zone they are deflected back to the neutralizing zone by a cylindrical conductor biased to deflect the high energy electrons and an accelerating grid for accelerating the electrons back through the beam neutralizing zone.
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