Process control interface system for managing measurement data

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United States of America Patent

PATENT NO 4805089
SERIAL NO

06864024

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of controlling a process using a programmed digital computer with a set of process control programs. An operator control program allows the user to select and run a specified process and to collect measurement data while the selected process is run. A data analysis program enables interactive computer controlled data analysis, including displaying a trand chart depicting a sequence of data points, each data point representing at least a portion of the measurement data collected and stored while running a selected process. A selectably positionable pointer is displayed on the trend chart for pointing at an individual data point so that the user can select and perform a predefined task on the measurement data stored in the data structure corresponding to the data point being pointed at by said selectably positionable pointer.

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Patent Owner(s)

Patent OwnerAddress
TENCOR INSTRUMENTS (A CA CORP )2400 CHARLESTON ROAD MOUNTAIN VIEW CA 94043

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lane, Leslie A Santa Clara, CA 7 896
Lybeck, Lynn V Moss Beach, CA 6 693
Mallory, Chester L Campbell, CA 14 684
Perloff, David S Sunnyvale, CA 11 1093

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