Image emission microscope with improved image processing capability
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United States of America Patent
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-
Mar 7, 1989
Grant Date -
N/A
app pub date -
Jan 4, 1988
filing date -
Jan 4, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An emission microscope includes integrating and enhancing devices operating in parallel for optimizing the image of a scanned semiconductor device. Integration is terminated when sufficient clarity is acquired. The system further incorporates adaptive histogram matching using a noise distribution curve. Those pixels not meeting a predetermined intensity level are deleted to further enhance image display.
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