Process for making diamond, doped diamond, diamond-cubic boron nitride composite films

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United States of America Patent

PATENT NO 4816291
SERIAL NO

07087141

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Abstract

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A process and apparatus that may be used for the production of diamond and doped diamond films at high rates by activated reactive vapor deposition. Carbon is evaporated in a vacuum chamber in the presence of atomic hydrogen containing plasma to form diamond precursors which then deposit on a substrate located within the vacuum chamber.

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Patent Owner(s)

Patent OwnerAddress
REGENTS OF THE UNIVERSITY OF CALIFORNIA THE300 LAKESIDE DRIVE 22ND FLOOR OAKLAND CA 94612 UNITED STATES OF AMERICA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bunshah, Rointan F Playa del Ray, CA 13 516
Desphandey, Chandra V Los Angeles, CA 2 172
Doerr, Hans J Simi Valley, CA 7 376

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