Planar surface scanning system
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United States of America Patent
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Mar 28, 1989
Grant Date -
N/A
app pub date -
Nov 18, 1986
filing date -
Nov 18, 1986
priority date (Note) -
Expired
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Abstract
A surface scanning system defining an optical path for scanning a planar surface, in which an angularly moving scanner deflects a portion of the path, an optical element aligned with stationary portions of the optical path is driven in rectilinear sinusoidal motion for providing focus correction as the surface is scanned, and in which the sinusoidal motion of the optical element and the motion of the scanner are caused to be interdependent in frequency and phase. The sinusoidal motion of the optical element maintains accurate focus on the planar surface. In another aspect a device for moving an optical element in linear resonant motion includes a cantilevered resilient support structure arranged to permit only linear motion of the element, and means for driving the element resonantly. In another aspect apparatus for detecting the position of a beam being scanned on a surface includes oscillator means whose frequency is synchronized to the changing velocity of the scanning on the surface, and means for switching the oscillator to its maximum resolution frequency during portions of the scanning when the beam is not within an active area of the surface. In another aspect, the reading or writing on the surface occurs only at times during which the optical element is not at its maximum negative excursion.
First Claim
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- GENERAL SCANNING, INC.
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Paulsen, Dean R | Danvers, MA | 8 | 179 |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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