Guiding device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4817930
SERIAL NO

07119462

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A guiding device comprising a carriage portion (13), which is aerostatically journalled on a base portion (11) and is guided in a rectilinear movement by means of five pre-stressed air bearings (21) in two guide planes of the base portion (11) enclosing an angle with each other. The air bearings (21) are pre-stressed by means of a magnet system comprising a permanent magnetic part and a ferromagnetic part, which are provided on the base portion and the carriage portion. Due to the fact that the magnetic system is arranged at an angle so that the plane of symmetry through the centre line of the magnet system encloses an acute angle with the two guide planes, all air bearings are pre-stressed solely by the magnet system. With the use of a linear electric motor (29) with permanent magnets for the drive of the carriage portion (13), the armature (41) and the stator (31) of the electric motor act at the same time as magnet system for pre-stressing the pre-tension air bearings.

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Patent Owner(s)

Patent OwnerAddress
ASM LITHOGRAPHY B VDE RUN 1110 NL-5503 LA VELDHOVEN

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Van, Deuren Fransiscus H Eindhoven, NL 2 53

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