Electrical particle gun
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United States of America Patent
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-
Apr 25, 1989
Grant Date -
N/A
app pub date -
Sep 23, 1987
filing date -
Mar 25, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electrical particle gun with applications in electronic and ionic microlithography for the integrated circuits industry comprises an emission chamber. In the emission chamber are a source adapted to emit the particles and devices for accelerating and focussing the particles. An exciter circuit is electrically connected to a decelerator electrode adjacent the focussing device. This enables pulsed emission of particles with an energy level lying within a predetermined band and filtering of the particles according to their energy level.
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