Heterodyne interferometer
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United States of America Patent
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May 30, 1989
Grant Date -
N/A
app pub date -
Jan 12, 1987
filing date -
Jan 12, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
This invention concerns a heterodyne interferometer for measuring the amplitude of vibration of a vibrating object. The invention is particularly useful for measuring the amplitude of vibrations of objects having reflectivities below about 0.02% or for measuring vibrations amplitudes below about 10.sup.-17 cm. The invention comprises a laser and a beam splitter for producing an object light wave and a reference light wave; at least one modulator for changing the frequencies of the object light wave and the reference light wave thereby producing a predetermined offset; means for directing the object light wave onto the vibrating object; and a photodetector for producing, at a frequency equal to the predetrmined offset, a beat signal which varies according to variations in the interference resulting from combining the reflected object light wave and the reference light wave.
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