Process for forming deposition film
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United States of America Patent
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May 30, 1989
Issued Date -
N/A
app pub date -
Feb 22, 1988
filing date -
Aug 16, 1983
priority date (Note) -
Expired
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Abstract
A process for forming a deposition film on a substrate comprises introducing separately a precursor or activated species formed in a decomposition space (B) and activated species formed in a decomposition space (C), into the deposition space wherein the film is formed on the substrate.
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