Magnetron cathode and method for sputter coating
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United States of America Patent
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Jun 27, 1989
Grant Date -
N/A
app pub date -
Feb 23, 1988
filing date -
Feb 23, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A magnetron sputter coating assembly. The assembly includes a concave consumable target spaced closely to a substrate coating position. Coating uniformity is maintained by controlling ion formation between the substrate and the target. This is accomplished with a plurality of ferromagnetic pole pieces and two individually energizable current carrying coils. The consumable target may be constructed in two segments. A first inner segment defines a generally planar target base parallel to the substrate surface to be coated. A second, outer target segment has a coating surface that forms an angle with respect to the substrate surface.
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