Integrated semiconductor circuit and method for producing it, and use of such a circuit for providing a flow meter
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United States of America Patent
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-
Jun 27, 1989
Grant Date -
N/A
app pub date -
Jan 16, 1987
filing date -
May 21, 1985
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An integrated semiconductor circuit including at least two mutually separated wafer parts (3, 4) of semiconductor material and conductors (7) for establishing electrical conection between the wafer parts is disclosed with a thermally insulating jointing substance (9) which is applied across the gap between the wafer parts (3, 4) for holding these parts together. The jointing substance (9) is mechanically supporting for holding the wafer parts (3, 4) together, and the conductors (7) are so dimensioned that they have a negligible supporting function as compared with the jointing substance (9). A method for producing such a cirucit and the use of the circuit for providing a flow meter for measuring the flow velocity of a flowing gaseous or liquid medium are also disclosed.
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