Method for deposition of hard carbon film
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United States of America Patent
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-
Jul 4, 1989
Issued Date -
N/A
app pub date -
May 20, 1987
filing date -
Mar 27, 1984
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A diamond-like hard carbon film is formed on a substrate by impinging particles of carbon onto a surface of the substrate, bombarding the surface of the substrate with accelerated particles of inert gas or particles of carbon together with hydrogen in a direction not more than 10 degrees out of parallel to the surface so that the particles of carbon aggregate on the surface, at room temperature.
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