Method of producing a diaphragm on a substrate
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United States of America Patent
Stats
-
Jul 18, 1989
Grant Date -
N/A
app pub date -
Dec 9, 1987
filing date -
Dec 13, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The invention provides a method of producing on a substrate a diaphragm which is electrically isolated from the substrate. The method comprises obtaining a substrate (2) having a diaphragm(1) thereon which comprises a flexible central portion (1a) and a shouldered peripheral portion which supports the central portion (1a) above the substrate (2), applying a mask (6) over at least a part of the central portion (1a) and converting the unmasked portion (1b) of the diaphragm to a dielectric so as to electrically isolate the masked central portion (1a) of the diaphragm from the substrate (2).
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