Cathode arc discharge evaporating device
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United States of America Patent
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-
Jul 18, 1989
Grant Date -
N/A
app pub date -
Mar 14, 1988
filing date -
Mar 16, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Cathode arc discharge evaporating device having a body of revolution as cathode. The target surface is arranged at the outside surface of the body of revolution. To control movement of the arc spot a magnetic field generating device is provided inside the body of revolution, which may be moveable with respect to the cathode.
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